| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam drawing device and a charged particle beam drawing method such that drawing speeds of respective small areas become more suitable than conventional one when each small area is drawn at a variable drawing speed. SOLUTION: The drawing device 100 as an embodiment of the present invention includes a division unit 122 which virtually divides a drawing area of a sample 101 into a plurality of small areas in a drawing direction, a linear programming arithmetic unit 128 which computes drawing speeds of the plurality of small areas by using linear programming, and a drawing unit 150 which draws desired patterns in the respective small areas at the computed drawing speeds of the respective small areas. In the present invention, a total drawing time can be shortened. COPYRIGHT: (C)2009,JPO&INPIT
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