发明名称 Positive resist composition for recording medium master, and method of producing recording medium master and method of producing stamper using the same
摘要 Provided are a positive resist composition for recording medium master showing excellent plating resistance and adhesion to a base plate such as glass or the like characterized by containing a vinyl polymer which has a monomer unit having an alkali-soluble group blocked by an alkyl vinyl ether, and a method of producing a recording medium master or stamper using this positive resist composition.
申请公布号 US2009045552(A1) 申请公布日期 2009.02.19
申请号 US20060918739 申请日期 2006.04.18
申请人 IMAI GENJI;KOJIMA DAISUKE 发明人 IMAI GENJI;KOJIMA DAISUKE
分类号 H05B6/02;G03C1/73;G03F7/20 主分类号 H05B6/02
代理机构 代理人
主权项
地址