发明名称 |
Positive resist composition for recording medium master, and method of producing recording medium master and method of producing stamper using the same |
摘要 |
Provided are a positive resist composition for recording medium master showing excellent plating resistance and adhesion to a base plate such as glass or the like characterized by containing a vinyl polymer which has a monomer unit having an alkali-soluble group blocked by an alkyl vinyl ether, and a method of producing a recording medium master or stamper using this positive resist composition.
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申请公布号 |
US2009045552(A1) |
申请公布日期 |
2009.02.19 |
申请号 |
US20060918739 |
申请日期 |
2006.04.18 |
申请人 |
IMAI GENJI;KOJIMA DAISUKE |
发明人 |
IMAI GENJI;KOJIMA DAISUKE |
分类号 |
H05B6/02;G03C1/73;G03F7/20 |
主分类号 |
H05B6/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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