| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a gray tone mask by which a light shielding film and a translucent film are formed from film materials having approximate etching characteristics without providing an etching stopper film, and misalignment of a pattern in a translucent part is prevented. <P>SOLUTION: The method for manufacturing a gray tone mask includes steps of: preparing a mask blank having a light shielding film formed on a transparent substrate; forming a resist pattern in a region corresponding to a light shielding part and a light transmitting part on the mask blank and etching a bare light shielding film using the resist pattern as a mask so as to expose the transparent substrate in a region corresponding to a translucent part; removing the residual resist pattern and forming a translucent film over the entire face of the obtained substrate to form the translucent part; and forming a resist pattern in a region corresponding to the light shielding part and the translucent part and etching the exposed translucent film and light shielding film by using the resist pattern as a mask to form the light transmitting part and the light shielding part. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
