发明名称 JET SYSTEM FOR SPHERICAL DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a system for and method of producing extremely-small (e.g. 1 mm diameter) spherical devices. <P>SOLUTION: The system includes a supply system for supplying a prescribed amount of a raw material 20 into a chamber 40 to melt the raw material 20. The prescribed amount of the melted raw material 44 (droplets) is measured and is supplied to a dropper 50 for releasing the droplets into a drop tube in which they are cooled and solidified into spherical silicon devices. The system includes a container of silicon powder in which the solidified spherical devices are received from the drop tube and which includes a stirring mechanism for agitating the silicon powder. The system also includes a separator for separating the powder from the solidified spherical devices after the devices have been received into the container. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009035476(A) 申请公布日期 2009.02.19
申请号 JP20080202155 申请日期 2008.08.05
申请人 BALL SEMICONDUCTOR INC 发明人 HANABE MURALI;PATEL NAINESH J
分类号 B01J2/04;C30B30/08;B01J2/02;C01B33/02;C30B11/00;C30B29/06;H01L29/06 主分类号 B01J2/04
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