发明名称 |
JET SYSTEM FOR SPHERICAL DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system for and method of producing extremely-small (e.g. 1 mm diameter) spherical devices. <P>SOLUTION: The system includes a supply system for supplying a prescribed amount of a raw material 20 into a chamber 40 to melt the raw material 20. The prescribed amount of the melted raw material 44 (droplets) is measured and is supplied to a dropper 50 for releasing the droplets into a drop tube in which they are cooled and solidified into spherical silicon devices. The system includes a container of silicon powder in which the solidified spherical devices are received from the drop tube and which includes a stirring mechanism for agitating the silicon powder. The system also includes a separator for separating the powder from the solidified spherical devices after the devices have been received into the container. <P>COPYRIGHT: (C)2009,JPO&INPIT |
申请公布号 |
JP2009035476(A) |
申请公布日期 |
2009.02.19 |
申请号 |
JP20080202155 |
申请日期 |
2008.08.05 |
申请人 |
BALL SEMICONDUCTOR INC |
发明人 |
HANABE MURALI;PATEL NAINESH J |
分类号 |
B01J2/04;C30B30/08;B01J2/02;C01B33/02;C30B11/00;C30B29/06;H01L29/06 |
主分类号 |
B01J2/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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