RADIOGRAPHIC INSPECTION APPARATUS, RADIOGRAPHIC INSPECTION METHOD AND RADIOGRAPHIC INSPECTION PROGRAM

摘要

PROBLEM TO BE SOLVED: To accurately detect foreign matter while clearly distinguishing the foreign matter of specific shape from a defect. SOLUTION: A transmission image of an inspection object is acquired by radiation irradiated on the inspection object, and a feature quantity corresponding to the foreign matter of asymmetric shape defined beforehand is acquired based on the transmission image. The quality of the inspection object is determined based on the feature quantity. COPYRIGHT: (C)2009,JPO&INPIT