发明名称 |
Method of measuring the transmittance of optical members for ultraviolet use |
摘要 |
<p>A method is provided for evaluating a transmittance of an optical member for ultraviolet use, which is an object of measurement. The method includes the steps of cleaning the object of measurement, measuring a transmittance of the object of measurement within a predetermined time period from completion of the cleaning during which a rate of decrease in the transmittance of the object of measurement remains substantially constant, and correcting the transmittance measured in the step of measuring to a transmittance at an evaluation time arbitrarily selected within the predetermined time period in accordance with the constant rate of decrease in the transmittance and a time at which the transmittance is measured. <IMAGE></p> |
申请公布号 |
EP1050754(B1) |
申请公布日期 |
2009.02.18 |
申请号 |
EP20000107019 |
申请日期 |
2000.03.31 |
申请人 |
NIKON CORPORATION |
发明人 |
YOSHIDA, AKIKO;KOMINE, NORIO;JINBO, HIROKI |
分类号 |
G01N21/59;C03B20/00;G01M11/00;G01N21/33;G02B1/00;G03F7/20 |
主分类号 |
G01N21/59 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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