发明名称 ELECTROLYTIC METHOD FOR FILLING HOLES AND CAVITIES WITH METALS
摘要 Disclosed is an electroplating method for filling cavities, through holes, pocket holes, or micropocket holes of a workpiece with metals. According to said method, the workpiece containing cavities, through holes, pocket holes, or micropocket holes is brought in contact with a metal deposition electrolyte, and a voltage is applied between the workpiece and at least one anode such that a current flow is fed to the workpiece. The inventive method is characterized in that the electrolyte encompasses a redox system.
申请公布号 KR20090017492(A) 申请公布日期 2009.02.18
申请号 KR20087026278 申请日期 2007.03.30
申请人 ATOTECH DEUTSCHLAND GMBH 发明人 REENTS BERT;ROELFS BERND;MAGAYA TAFADZWA;YOUKHANIS MARKUS;WENZEL RENE;KIM SOUNGSOO
分类号 C25D3/00;C25D5/00;H05K3/18 主分类号 C25D3/00
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