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发明名称
摘要
申请公布号
JP4226700(B2)
申请公布日期
2009.02.18
申请号
JP19980268480
申请日期
1998.09.22
申请人
发明人
分类号
C23C14/00;H01L21/205
主分类号
C23C14/00
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