发明名称 INSPECTION APPARATUS FOR PATTERN
摘要 The invention provides a design detecting device which can judge the position of the cross short circuit without making the electrodes contact with the conductive design. Two current electrodes and two detecting electrodes are arranged on the sensor in the approximately cross shape. The sensor moves along the crossing line of the cross short circuit, wherein the current electrodes apply the AC voltage to the cross line. In addition, the detecting electrodes and the opposite grid line are in electrostatic coupling. Through the movement of the sensor, when the detecting electrodes move to the opposite position of the grid line generating the cross short circuit, the detecting electrodes respond the larger AC voltage. According to the change of the voltage value generated by induction, the position of the cross short circuit is judged.
申请公布号 KR100883994(B1) 申请公布日期 2009.02.17
申请号 KR20070105124 申请日期 2007.10.18
申请人 发明人
分类号 G02F1/13 主分类号 G02F1/13
代理机构 代理人
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