发明名称 |
Formation of conductive templates employing indium tin oxide |
摘要 |
The present invention is directed to a method forming conductive templates that includes providing a substrate; forming a mesa on the substrate; and forming a plurality of recessions and projections on the mesa with a nadir of the recessions comprising electrically conductive material and the projections comprising electrically insulative material. It is desired that the mesa be substantially transparent to a predetermined wavelength of radiation, for example ultraviolet radiation. As a result, it is desired to form the electrically conductive material from a material that allows ultraviolet radiation to propagate therethrough. In the present invention indium tin oxide is a suitable material from which to form the electrical conductive material. |
申请公布号 |
US7491637(B2) |
申请公布日期 |
2009.02.17 |
申请号 |
US20060470829 |
申请日期 |
2006.09.07 |
申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
SREENIVASAN SIDLGATA V.;MCMACKIN IAN M.;CHOI BYUNG-JIN;VOISIN RONALD D. |
分类号 |
H01L21/4763;C03C17/34;G03F7/00 |
主分类号 |
H01L21/4763 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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