发明名称 Apparatus for inspecting alignment film and method for fabricating liquid crystal display device using the same
摘要 An apparatus for inspecting an alignment film and a method for fabricating a liquid crystal display device using the same are disclosed. By changing a spraying structure of a steam inspecting unit to check whether an alignment film is defective or not, a water splash phenomenon can be prevented and spraying can be performed uniformly on a large-scale glass. The apparatus for inspecting an alignment film comprises a first steam generating unit for generating first steam; a second steam generating unit for generating second steam by using the first steam as a heat source; and a steam spraying unit for spraying the second steam onto a substrate of a substrate to inspect an alignment film formed on the substrate.
申请公布号 US7492437(B2) 申请公布日期 2009.02.17
申请号 US20050315628 申请日期 2005.12.23
申请人 LG DISPLAY CO., LTD. 发明人 MOON SEUNG WON;CHOI BYOUNG CHUL
分类号 G02F1/133;G02F1/1337 主分类号 G02F1/133
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