| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for reactivating an adsorbent, in which the adsorbent used for producing or recycling a liquid, which exhibits excellent transmittance to the light having 193 nm wavelength and is used for immersion exposure, is reactivated. <P>SOLUTION: The adsorbent being at least one oxide selected from alumina, silica-alumina and zeolite, which is used for producing or recycling the liquid, which exhibits ≥99% transmittance per 1 mm optical path length to the light having 193 nm wavelength, consists of at least one alicyclic saturated hydrocarbon compound selected from 1,1'-bicyclohexyl exo-tetrahydrodicyclopentadiene and trans-decahydronaphthalene and is used for the immersion exposure, is dried at the temperature of ≤200°C and the dried adsorbent is heat-treated at 250-700°C. <P>COPYRIGHT: (C)2009,JPO&INPIT |
