DEVICE FOR MANUFACTURING LINEAR SCALE

摘要

PROBLEM TO BE SOLVED: To provide a device for manufacturing a linear scale capable of processing scale patterns of a plurality of tracks at a high speed.

SOLUTION: A stage 8 for moving a material 7 to be processed in a longitudinal direction is controlled to be moved by a moving control device 9. A galvano-mirror 4 deflects a laser light beam 11 such that a position of a radiation spot to the material 7 to be processed is made to be in a direction perpendicular to a moving direction of the material 7 to be processed. A regulating means 10 regulates on/off controlling of the laser light beam 11 by a laser control device 2, controlling of movement of the stage 8 by the movement control device 9 and controlling of a deflected position by the galvano-mirror 4 so as to form arbitrary scale patterns on the plurality of tracks.

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