A PROBE ARRAY STRUCTURE AND A METHOD OF MAKING A PROBE ARRAY STRUCTURE
摘要
Probe array structures and methods of making probe array structures are disclosed. A plurality of electrically conductive elongate contact structures disposed on a first substrate can be provided. The contact structures can then be partially encased in a securing material such that ends of the contact structures extend from a surface of the securing material. The exposed portions of the contact structures can then be captured in a second substrate.
申请公布号
WO2007081522(A3)
申请公布日期
2009.02.12
申请号
WO2006US48723
申请日期
2006.12.19
申请人
FORMFACTOR, INC.;ELDRIDGE, BENJAMIN, N.;FANG, TRELIANT;GRITTERS, JOHN K.;KHANDROS, IGOR, Y.;MA, LUNYU;MATHIEU, GAETAN, L.
发明人
ELDRIDGE, BENJAMIN, N.;FANG, TRELIANT;GRITTERS, JOHN K.;KHANDROS, IGOR, Y.;MA, LUNYU;MATHIEU, GAETAN, L.