发明名称 A PROBE ARRAY STRUCTURE AND A METHOD OF MAKING A PROBE ARRAY STRUCTURE
摘要 Probe array structures and methods of making probe array structures are disclosed. A plurality of electrically conductive elongate contact structures disposed on a first substrate can be provided. The contact structures can then be partially encased in a securing material such that ends of the contact structures extend from a surface of the securing material. The exposed portions of the contact structures can then be captured in a second substrate.
申请公布号 WO2007081522(A3) 申请公布日期 2009.02.12
申请号 WO2006US48723 申请日期 2006.12.19
申请人 FORMFACTOR, INC.;ELDRIDGE, BENJAMIN, N.;FANG, TRELIANT;GRITTERS, JOHN K.;KHANDROS, IGOR, Y.;MA, LUNYU;MATHIEU, GAETAN, L. 发明人 ELDRIDGE, BENJAMIN, N.;FANG, TRELIANT;GRITTERS, JOHN K.;KHANDROS, IGOR, Y.;MA, LUNYU;MATHIEU, GAETAN, L.
分类号 G01R31/02 主分类号 G01R31/02
代理机构 代理人
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