| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid-material dropping method which uniformizes a dropping operation by a plurality of dropping dispensers and improves operation rate and productivity of the liquid-material dropping apparatus, and to provide its apparatus. SOLUTION: The liquid-material dropping method has the process in which a substrate stage 20 is made to rotate so that the direction of rows in a residual dropping area N, which are not allocated uniformly to each dropping dispenser D1-D4 of a substrate 1 by a first dropping operation, goes along the X direction, the residual dropping area N of the substrate 1 is allocated to each of the plurality of dropping dispensers D1-D4, and a second dropping operation for dropping the liquid material in parallel for the residual area N of the substrate 1, which is allocated to each dropping dispenser D1-D4, by each dropping dispenser D1-D4. COPYRIGHT: (C)2009,JPO&INPIT
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