发明名称 |
LATERAL POCKET IMPLANT CHARGE TRAPPING DEVICES |
摘要 |
A charge trapping memory cell is described, having pocket implants along the sides of the channel and having the same conductivity type as the channel, and which implants have a concentration of dopants higher than in the central region of the channel. This effectively disables the channel in the region of non-uniform charge trapping caused by a bird's beak or other anomaly in the charge trapping structure on the side of the channel. The pocket implant can be formed using a process compatible with standard shallow trench isolation processes.
|
申请公布号 |
US2009040829(A1) |
申请公布日期 |
2009.02.12 |
申请号 |
US20080102410 |
申请日期 |
2008.04.14 |
申请人 |
MACRONIX INTERNATIONAL CO., LTD. |
发明人 |
LUE HANG-TING |
分类号 |
G11C11/34;H01L21/8247;H01L29/792 |
主分类号 |
G11C11/34 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|