| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for controlling a Q-value of a cantilever capable of reaching a target Q-value more simply without manual adjustment. SOLUTION: This Q-value control device of the cantilever of dynamic force AFM for vibrating the cantilever 3 by a vibration element 4 and performing AFM feedback has a constitution wherein a loop circuit for performing positive feedback of a frequency signal near a resonance frequency of the cantilever 3 is integrated into a drive circuit 9 for vibrating the cantilever 3, and a means is provided, for controlling reachably to the target Q-value by using a relation expression: (Q<SB>eff</SB>/Q<SB>org</SB>)=k(V<SB>rms</SB>_<SB>eff</SB>/V<SB>rms</SB>_<SB>org</SB>), where, an original Q-value of the cantilever 3 is Q<SB>org</SB>, an original vibration amplitude of the cantilever is V<SB>rms</SB>_<SB>org</SB>, a present Q-value is Q<SB>eff</SB>, a present cantilever vibration amplitude is V<SB>rms</SB>_<SB>eff</SB>, and a proportional constant is k. COPYRIGHT: (C)2009,JPO&INPIT
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