| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method using a scanning electron microscope which detects an highly-accurate electron beam image and excludes limitation of an AD conversion element for a sampling rate as a subject matter. SOLUTION: A sampling signal is obtained by sampling an analog brightness signal formed by a secondary electron detector at a designated sampling rate. N digital values are added in sequence per every continuous N digital values included in the sampling signal, and the digital brightness signal at one Nth frequency of the sampling frequency is formed. Then, a digital signal made of digital values of the bit number same as the bit number of the sampling signal is formed by dividing each digital value of the digital brightness signal by N. An image signal wherein each digital value of the digital signal becomes one pixel is formed. COPYRIGHT: (C)2009,JPO&INPIT
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