METHOD AND APPARATUS FOR DESIGNING AN INTEGRATED CIRCUIT

摘要

Method and apparatus for designing an integrated circuit by providing an IC layout design (220). Adding one or more assist features (60, 130) to the IC layout design. Identifying which of the one or more added assist features (60, 130) in the IC layout design will cause one or more defects (40) in the resultant wafer die manufactured from the IC layout design. Amending the one or more identified assist features (60, 130).