| 摘要 |
A semiconductor device fabrication method by which a desired pattern can be formed. After a conductive layer which is a material for a gate electrode is formed, a SiN layer to be used as a hard mask is formed. Then a photoresist layer is formed as a second mask. Then patterning is performed on the photoresist layer. Then patterning is performed on the SiN layer with the photoresist layer as a mask. After the photoresist layer is removed, surface portions of the SiN layer are transmuted and are selectively removed. The conductive layer under the SiN layer is etched with the reduced SiN layer as the hard mask. By doing so, the photoresist layer does not, for example, deform during the process and a minute gate electrode pattern can be formed stably.
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