ATMOSPHERIC PRESSURE PLASMA APPARATUS AND METHOD FOR ATMOSPHERIC PRESSURE PLASMA TREATMENT OF CONDUCTIVE POLYMER COMPOSITIONS

摘要

An atmospheric pressure plasma apparatus and a method for atmospheric pressure plasma treatment of a conductive polymer composition using the same are provided to improve adhesive force between the conductive polymer composition and matrix material by imparting hydrophilic or hydrophobic characteristics to a silicon semiconductor, or various plastic films, paper, glass, and metal foil as matrix material. An atmospheric pressure plasma apparatus comprises an RF power(2), an atmospheric pressure plasma reactor(6), a matching box(4), a gas feeder(8), and a specimen feeder(10). The RF power ionizes reaction gas to supply electrical energy required for making plasma. The atmospheric pressure plasma reactor includes a discharge space formed between a first electrode and a second electrode, a buffer space formed along the length direction of the first electrode, a mixing space of which one side is opened to the discharge space, a reaction gas supply path formed as an orifice communicating with the buffer space and mixing space, a pair of dielectric films installed between the first and second electrodes, and a matrix material transfer path formed between the dielectric films. The matching box converts electrical energy supplied from the RF power into electrical energy having a frequency of 100 kHz to 60 MHz and a power density of 5 to 15 W/cm^2 and supplies the converted electrical energy to the atmospheric pressure plasma reactor. The gas feeder feeds reaction gas to the atmospheric pressure plasma reactor. The specimen feeder feeds the matrix material and specimens including a conductive polymer composition to the atmospheric pressure plasma reactor.