发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 A semiconductor device includes a first gate electrode formed in a first region on a semiconductor substrate with a first gate insulating film sandwiched therebetween; and a second gate electrode formed in a second region on the semiconductor substrate with a second gate insulating film sandwiched therebetween. The first gate insulating film includes a first high dielectric constant insulating film with a first nitrogen concentration and the second gate insulating film includes a second high dielectric constant insulating film with a second nitrogen concentration higher than the first nitrogen concentration.
申请公布号 US2009039437(A1) 申请公布日期 2009.02.12
申请号 US20080172680 申请日期 2008.07.14
申请人 OGAWA HISASHI 发明人 OGAWA HISASHI
分类号 H01L27/092;H01L21/28 主分类号 H01L27/092
代理机构 代理人
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