PULSIMETER SENSOR USING SPIN-VALVE MAGNETORESISTIVE ELEMENT WITH PERPENDICULAR MAGNETIC ANISOTROPY

摘要

A pulsimeter sensor using the vertical magnetic anisotropy spin valve magnetic reluctance element is provided to have the high magnetoresistance ratio by forming the free layer and a fixed layer into the Pd layer / ferromagnetic layer more than 2 or the ferromagnetic layer / Pd layer. A pulsimeter sensor comprises a skin contactor (10), a pulse wave perception sensor(20) and a separate space part(30). The skin contactor is made of the magnetic material. The pulse wave perception sensor of the array shape is made of the magnetic thin film layer(22) more than two. The separate space part forms the predetermined space between the skin contactor and the pulse wave perception sensor. The magnetic thin film layer of the pulse wave perception sensor includes a free layer / nonmagnetic layer / fixed layer / anti- ferroelectric layer. In the free layer and the fixed layer, the Pd layer / the first ferromagnetic layer or the first ferromagnetic layer / Pd layer is evaporated in 2 to N times repeatedly. The first ferromagnetic layer is perpendicularly magnetized in the surface of the Pd layer.