Sensor with position-indepedent drive electrodes in multi-layer silicon on insulator substrate

摘要

A micoroelectromechanical system (MEMS) includes a housing (40) defining an enclosed cavity (42), stator tines (46) extending from the housing (40) into the cavity (42), a MEMS device located within the cavity, the MEMS device including a proof mass (48) and rotor tines (50) extending from the proof mass, each rotor tine being positioned at a capacitive distance from a corresponding stator tine. The rotor tines include a first section extending a first distance from an insulating layer of the rotor tines and a second section extending a second distance from the insulating layer in an opposite direction from the first section. The stator tines include a first section extending a first distance from an insulating layer of the stator tines and a second section extending a second distance from the insulating layer in an opposite direction from the first section, the stator tine first distance being greater than the rotor tine first distance.