发明名称 Component with a piezoelectric functional layer
摘要 An electrical component includes a substrate, a first electrode layer, a structured growth layer that is thinner than the first electrode layer, a piezoelectric layer, and a second electrode layer. The growth layer is on the first electrode layer, the growth layer is structured relative to the first electrode layer, and the growth layer has a smaller surface area than the first electrode layer. The growth layer may be selected to support ordered growth relative to the piezoelectric layer.
申请公布号 US7489067(B2) 申请公布日期 2009.02.10
申请号 US20040552927 申请日期 2004.02.06
申请人 EPCOS AG 发明人 METZGER THOMAS;DIEKMANN CHRISTIAN;SCHMIDHAMMER EDGAR
分类号 H01L41/08;B31D5/00;B65B3/00;H01L41/083;H01L41/22;H01L41/319;H03H9/02;H03H9/13;H03H9/17;H03H9/58 主分类号 H01L41/08
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