| 摘要 |
An automation development system is provided to produce a code controlling control target equipment by standardized SECS(semiconductor equipment communications standard) message and to implement code generation into a form of a flowchart or a diagram and to be depended on no specific program. A SECS(semiconductor equipment communications standard) driver(51) supports an S9 stream according to the SECS, transmits or receives Data and performs SECS message communication, event process, timeout process, alarm process and process of ineffective message. A SECS encoder(52) converts data transmitted from control object device to a host into data according to SECS. A SECS decoder(53) converts data type which developers look into data transformed by the SECS encoder. A SECS manager(54) classifies type of message into one of stream or function. A work pool(55) processes the stream or the function by using the message according to the SECS. A visual processing unit(56) indicates a component module called in a module list in display device in a form of flowchart or diagram. A module selected from component modules is indicated in interface.
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