| 摘要 |
To accurately inspect conformity of a wiring pattern without increasing a measuring time nor increasing sizes and cost of an inspecting apparatus. A mirror-finished drum (32) is arranged on the rear side of a TAB tape (T), and a wiring pattern image of an inspection area (D) is imaged by applying illuminating light from the front side. Light passed through at a part of the light transmitting insulating film (60) is reflected by the drum (32), passes through the light transmitting insulating film (60) as indirect transmitting light and returns to the front side. Thus, defects, which relate to short-circuiting on the light transmitting insulating film (60) and are difficult to be detected when the mirror-finished drum (32) is not arranged on the rear side, can be detected at the same time when a defect on the front side of the wiring pattern (61) is detected. |
