| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for damage free or damage-reduced sputter coating on top of an organic material layer, e.g. on top of an OLED layer, the method having an acceptable coating ratio. SOLUTION: The sputter coating device comprises: a coating chamber; substrates 110a, 110b each having an organic material layer deposited thereon; at least a rotatable cathode unit arranged in the coating chamber comprising at least one rotatable target 102 and a magnet assembly 104 for generating at least one plasma confinement zone arranged above at least one surface section of the target 102; scattering zone for scattering the sputtered particles; and means for selectively preventing a portion of the sputtered particles from moving to the substrate surface. COPYRIGHT: (C)2009,JPO&INPIT
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