| 摘要 |
PROBLEM TO BE SOLVED: To provide a method by which used etching liquid, which is generated by using a new etching liquid containing manganese salt and in which a halogen acid and/or its salt are accumulated, is electrolyzed to decrease the concentration of the halogen acid and/or its salt so that the electrolyzed etching liquid can be used continuously for a long time. SOLUTION: The etching liquid consists of an aqueous solution containing 20-1,200 g/L inorganic acid, 0.01-40 g/L manganese salt and 1-200 g/L at least one component selected from the group consisting of a perhalogen acid and its salt. In the method of electrolyzing etching liquid, used etching liquid, in which the concentration of the halogen acid or its salt is increased, is electrolyzed, namely, oxidized anodically. COPYRIGHT: (C)2009,JPO&INPIT
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