发明名称 PATTERNED THIN SOI
摘要 A process for treating a structure to prepare it for electronics or optoelectronics applications. The structure includes a bulk substrate, an oxide layer, and a semiconductor layer, and the process includes providing a masking to define on the semiconductor layer a desired pattern, and applying a thermal treatment for removing a controlled thickness of oxide in the regions of the oxide layer corresponding to the desired pattern to assist in preparing the structure.
申请公布号 US2009032911(A1) 申请公布日期 2009.02.05
申请号 US20070280639 申请日期 2007.03.19
申请人 S.O.I.TECSILICON ON INSULATOR TECHNOLOGIES PARC TECHNOLOGIQUE DES FONTAINES 发明人 KONONCHUK OLEG
分类号 H01L21/762;H01L23/58 主分类号 H01L21/762
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