| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrying robot having a linear motion type arm and a direct drive type motor as a rotational driving part and using a motor rotating position detector detecting a position within one rotation. SOLUTION: A large pulley 16 putting a multistage linear motion type arm in extending/contracting operation is constituted to have such a diameter that the rotating amount by a first belt is less than one rotation even if a connection plate for linearly driving a second arm moves a stroke amount in a linear portion of the first belt. COPYRIGHT: (C)2009,JPO&INPIT
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