| 发明名称 |
High precision accelerometer |
| 摘要 |
The present invention provides an accelerometer which is more manufacturable, higher performance, and more survivable. This invention is particularly applicable for ultra-low-g sensors and ultra-high-g sensors.
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| 申请公布号 |
US2002144548(A1) |
申请公布日期 |
2002.10.10 |
| 申请号 |
US20020118542 |
申请日期 |
2002.04.08 |
| 申请人 |
COHN MICHAEL B.;ROEHNELT RYAN |
发明人 |
COHN MICHAEL B.;ROEHNELT RYAN |
| 分类号 |
G01P15/125;(IPC1-7):G01P15/00 |
主分类号 |
G01P15/125 |
| 代理机构 |
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