| 摘要 |
PROBLEM TO BE SOLVED: To provide a static capacitance sensor component of a simple structure, an object mounting body provided with the static capacitance sensor component, a semiconductor manufacturing device, and a liquid crystal display element manufacturing device. SOLUTION: The static capacitance sensor component includes a static capacitance detecting portion. The static capacitance detecting portion includes a detecting electrode and a shield electrode. The detecting electrode has a detecting portion detecting electrode and a an electrode introducing portion detecting electrode for introducing the electrode to the detecting portion detecting electrode. The detecting electrode and the shield electrode are of a plane shape respectively and are laminated as different layers. When viewed as a plan from a lamination direction, the detecting portion detecting electrode and the shield electrode are not lapping over each other, and the detecting electrode and the shield electrode are arranged so that at least one part of the electrode introducing detecting electrode and the shield electrode can be overlapped. COPYRIGHT: (C)2009,JPO&INPIT
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