发明名称 MULTIPLE OXIDE THICKNESS FOR A SEMICONDUCTOR DEVICE
摘要 Techniques associated with providing multiple gate insulator thickness for a semiconductor device are generally described. In one example, an apparatus includes a semiconductor fin having an impurity introduced to at least a first side of the fin, a first oxide having a first thickness coupled with the first side of the fin, and a second oxide having a second thickness coupled with a second side of the fin, the second thickness being different from the first thickness as a result of the impurity introduced to the first side of the fin.
申请公布号 US2009032872(A1) 申请公布日期 2009.02.05
申请号 US20070830182 申请日期 2007.07.30
申请人 GILES MARTIN D;KENCKE DAVID L;CEA STEPHEN M 发明人 GILES MARTIN D.;KENCKE DAVID L.;CEA STEPHEN M.
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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