METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENCE DEVICE

摘要

Provided is an organic EL device manufacturing method, by which a film having a high barrier characteristic against vapor and oxygen can be formed while suppressing damages of an organic EL element, at the time of forming the film which contains an inorganic material layer for sealing the organic EL element. An organic EL element (20) is configured by sandwiching an organic EL layer (22), which contains a light emitting layer, between a pair of electrodes at least one of which is transparent or semitransparent. A sealing layer (30) contains at least one inorganic material film brought into contact with the organic EL element (20) and seals the organic EL element (20). At the time of forming the organic EL element and the sealing layer on a substrate (10), a first sealing film (31) which is brought into contact with the organic EL element (20) in the sealing layer (30), is formed by ion beam sputtering method, and other inorganic material film in the sealing layer (30) is formed by a film forming method other than the ion beam sputtering method.