发明名称 DESIGNING METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT, AND MASK DATA GENERATING PROGRAM
摘要 <p><P>PROBLEM TO BE SOLVED: To prevent designing/verification TAT of a semiconductor integrated circuit from increasing while taking pattern dependency of transistor characteristics into sufficient consideration. <P>SOLUTION: The designing method for the semiconductor integrated circuit includes a step (A) of generating layout data on the semiconductor integrated circuit and a step (B) of generating mask data based upon the layout data. The step (B) includes a step (B1) of extracting parameters defining a layout pattern of a periphery of an object transistor included in the semiconductor integrated circuit by referring to the layout data, wherein the parameters include at least a width of an element separation structure of the periphery of the object transistor; a step (B2) of correcting a gate length and a gate width of the object transistor so as to cancel variation in characteristic of the object transistor from a design value depending upon the extracted parameters; and a step (B3) generating the mask data from the layout data having the gate length and gate width corrected. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009026829(A) 申请公布日期 2009.02.05
申请号 JP20070186191 申请日期 2007.07.17
申请人 NEC ELECTRONICS CORP 发明人 YAMADA KENTA
分类号 H01L21/82;G03F1/36;G03F1/68;G03F1/70;G06F17/50 主分类号 H01L21/82
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