| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe for a scanning probe microscope that sets contact resistance to low impedance of the same degree as a bulk metal and measures the position of the probe, which traces the surface of a sample being a target measuring article by a means other than an optical means, and to provide the scanning probe microscope using the same. SOLUTION: The probe is at least constituted of a metal spring 1 sharpened at its one end, a tuning fork type quartz vibrator 2 being a piezoelectric element and a plurality of holders 6 and 3 for supporting them. Part of the metal spring 1 is brought into contact with the tuning fork type quartz vibrator 2 and the base part of the metal spring 1 is fixed to a first holder 6 so that the leading end of the metal spring 1 is movably arranged in the direction based on a vertical direction with respect to the surface of a sample to be measured while the tuning fork type quartz vibrator 2 is held to a second holder 3 and the position of the second holder 3 is regulated so as to change the contact state of the tuning fork type quartz vibrator 2 and the metal spring 1. COPYRIGHT: (C)2009,JPO&INPIT
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