APPARATUS FOR AIR CYLINDER AND WAFER CLEANING EQUIPMENT USED THE SAME

摘要

A wafer cleaning equipment including the air-cylinder apparatus is provided to maximize the productivity by controlling the gap between a plurality of brushes. A plurality of cylinders(256) has the internal space. The air outlet(257) is formed in the internal space. The air supply portion supplies the air of the prescribed input through a plurality of air outlets. A plurality of pistons(258) is formed in order to be reciprocated in the linearity in a plurality of cylinder inner spaces. The gear(261) moves a plurality of pistons to the opposite direction between a plurality of cylinders. A plurality of blocks is combined with a plurality of pistons. The distance between a plurality of blocks is controlled by controlling the translation distance of a plurality of pistons.