MICRO-BRIDGE STRUCTURE

摘要

A method of fabricating a micro-bridge device (14, 16) onto a substrate (20) . The method includes the steps of: pro-viding a sacrificial material (32) on a surface region of the substrate (20); patternwise etching the sacrificial material (32); providing a sensing material (34) on a surface region of the sacrificial material; providing a support material (36) on a surface region of the sensing material; and removing the sacrificial material (32) leaving support material (36) with the sensing material (34) on its lower surface, substantially free standing above the substrate (20).