THIN FILM TRANSISTOR SUBSTRATE AND METHOD OF MANUFACTURIG THE SAME

摘要

A TFT(Thin Film Transistor) substrate and a manufacturing method thereof are provided to accomplish high resolution and a large size of a display device, and to simplify a manufacturing process. A substrate is equipped. A first line pattern(180) is formed on the substrate. A first insulating film is formed to cover the first line pattern on the substrate equipped with the first line pattern. A semiconductor film pattern(123) is formed on the first insulating film. A second insulating film is formed on the first insulating film equipped with the semiconductor film pattern, and has connection holes(132,134) that expose a portion of the semiconductor film pattern. A second line pattern(190) is formed on the second insulating film, and a portion thereof is connected to the semiconductor film pattern through the connection holes of the second insulating film.