发明名称 |
DEFECT DETECTION SYSTEM WITH MULTILEVEL OUTPUT CAPABILITY AND METHOD THEREOF |
摘要 |
A defect detection system and related method take advantage of multilevel detection technique for detecting defects on an integrated circuit. The defect detection system utilizes an analog-to-digital converter for converting an analog sensing signal into an output code having a plurality of bits. The defect detection methods include an open test method and a short test method. The open and short test methods both include a calibrating method and a testing method individually. The calibrating method functions to determine a preset reference voltage for the analog-to-digital converter based on a predetermined code. The testing method makes use of the preset reference voltage and the predetermined code for generating the output code having a plurality of bits. The output code is then utilized to determine whether or not there are open or short defects on the integrated circuit and to classify the defects.
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申请公布号 |
US2009021266(A1) |
申请公布日期 |
2009.01.22 |
申请号 |
US20070778635 |
申请日期 |
2007.07.16 |
申请人 |
WANG CHIEN-KUO;KAO TAI-CHI;LIAO TSUOE-HSIANG;LEE YUAN-CHE;SUN YU-MING |
发明人 |
WANG CHIEN-KUO;KAO TAI-CHI;LIAO TSUOE-HSIANG;LEE YUAN-CHE;SUN YU-MING |
分类号 |
H01L21/66;G01R35/00 |
主分类号 |
H01L21/66 |
代理机构 |
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