| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern transfer method capable of accurately transferring a fine pattern shape without wasting energy, and a pattern transfer device. SOLUTION: The pattern transfer method for transferring a rugged pattern shape on a surface of a sheet has a step which applies the solvent for softening or dissolving the sheet on the surface of the sheet to soften and dissolve the surface, a step which brings the sheet having the surface softened or dissolved by the solvent into compressed-contact with a transfer member having a formed rugged pattern shape to transfer the rugged pattern shape on the surface where the rugged pattern shape is transferred on the softened or dissolved surface of the sheet, and a step which heats the sheet having a transferred rugged pattern shape and solidifies the surface of the sheet having the transferred rugged pattern shape by volatilizing the solvent applied on the sheet. COPYRIGHT: (C)2009,JPO&INPIT |
