| 摘要 |
PROBLEM TO BE SOLVED: To provide a backside-illuminated distance measuring sensor and a distance measuring device capable of detecting distance at high precision. SOLUTION: The backside-illuminated distance measuring sensor 1 includes a semiconductor board 1A having an image capturing region 1B which is composed of a plurality of two dimensionally arranged pixels P(m, n). Two electric charges (Q1, Q2) are output from the respective pixels P(m, n) as the signals d'(m, n) which have the above distance information. Respective pixels P(m, n) as micro distance measuring sensors output the signals d'(m, n) according to the distance to an object H so that, when the image of the reflected light from the object H is formed on the image capturing region 1B, the distance image of the object can be obtained as aggregates of the distance information to the respective points on the object H. When carriers generated at the deep portion of the semiconductor in response to incidence of near-infrared light for light projection are drawn into a potential well set at the vicinity of the carrier generating position opposite to the light incidence surface, fast and accurate distance measurement can be performed. COPYRIGHT: (C)2009,JPO&INPIT
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