CAPACITANCE TYPE ACCELERATION SENSOR AND MANUFACTURING METHOD THEREOF

摘要

A capacitance type acceleration sensor capable of detecting any and all acceleration regions and accurately performing acceleration measurements as well as being adaptable for miniaturization. The capacitance type acceleration sensor (1) is mainly composed of a silicon substrate (11) having a movable electrode (11a) and beams (11b) which resiliently support the movable electrode (11a), and a pair of glass substrates (12, 13) so disposed to hold the silicon substrate (11) therebetween. The movable electrode (11a) is supported resiliently by the beams (11b) at the both ends thereof. The movable electrode (11a) which is connected to the silicon substrate (11) via the beams (11b) is movable in a single axial direction shown by an arrow due to an inertial force resulted from acceleration. A fixed electrode (14) is formed in a self-aligned manner using the shape of the movable electrode (11a) during the formation of the movable electrode (11a).