发明名称 PROBE CARD AND TEMPERATURE STABILIZER FOR TESTING SEMICONDUCTOR DEVICES
摘要 One aspect of the invention provides an apparatus that includes a probe card (105) having probe needles (120) associated therewith. A temperature stabilizer element (135) is couplable to the probe card. The temperature stabilizer is configured to either raise or lower a temperature of the probe needles to reduce movement of the probe needles.
申请公布号 WO2007137065(A3) 申请公布日期 2009.01.22
申请号 WO2007US69032 申请日期 2007.05.16
申请人 TEXAS INSTRUMENTS INCORPORATED;HARRIS, MICHAEL, P.;MESA, FRANK, J.;MCCLANAHAN, ADOLPHUS, E.;WOLFE, JOHN, D. 发明人 HARRIS, MICHAEL, P.;MESA, FRANK, J.;MCCLANAHAN, ADOLPHUS, E.;WOLFE, JOHN, D.
分类号 G01R31/02 主分类号 G01R31/02
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