| 摘要 |
PROBLEM TO BE SOLVED: To quickly and easily measure height at a measuring point where an intrinsic phase difference is 2πor more. SOLUTION: A three-dimensional shape measuring instrument includes: an image imaging part for reading an optical pattern cyclically changing brightness as an image in response to a position projected on a measuring object; and an image analyzing part 100 for measuring a three-dimensional shape of the measuring object by analyzing the image read by the image imaging part. The image analyzing part 100 calculates a phase of the optical pattern in a certain pixel included in the image read by the image imaging part, and corrects the calculated phase, based on a measuring range indicating a range taken by the phase. The image analyzing part 100 calculates the height of the measuring object, based on the corrected phase and sets the measuring range, based on the corrected phase. COPYRIGHT: (C)2009,JPO&INPIT
|
