METHOD FOR MANUFACTURING INK-JET HEAD

摘要

An ink-jet head manufacturing method is provided to form components of an ink-jet head by etching a single substrate, thereby improving yield of production. An ink-jet head manufacturing method comprises the steps of: forming a chamber, a reservoir, a restrictor and a flow channel by etching a part of a substrate(S110); covering the chamber by bonding a membrane to the substrate through silicon direct bonding(S120); and uniting a nozzle plate in which a nozzle is formed with the substrate in order to cover the flow channel(S130). The substrate is SOI(silicon on insulator) substrate in which an insulating layer is interposed between two silicon layers.