发明名称 Time-domain computation of scattering spectra for use in spectroscopic metrology
摘要 In an embodiment, a method of time-domain simulation for simulating scattering spectra is described. The method may provide for computing spatial derivatives including computing spectral derivatives in some portion of the domain and finite difference derivatives in some other portion of the domain; forming an equation for non-reflecting boundary conditions; and computing a time-stepping scheme using a high-order unconditionally stable computation method.
申请公布号 US7480047(B1) 申请公布日期 2009.01.20
申请号 US20050320191 申请日期 2005.12.28
申请人 KLA-TENCOR CORPORATION 发明人 RATNER EDWARD;VELDMAN ANDREI;WACK DANIEL
分类号 G01J3/28;G01J4/00 主分类号 G01J3/28
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