| 摘要 |
<P>PROBLEM TO BE SOLVED: To remarkably improve a ratio of conforming articles while keeping high operation rate of a line. <P>SOLUTION: A color filter production line system 1 includes a stacker-crane-type core apparatus 10 and a plurality of processing lines 20, ..., 110 connected with a plurality of positions C1 and C2 for putting in/out substrates of the core apparatus 10 respectively via substrate put-in/out mechanisms 16a and 16b for performing various kinds of processing on glass substrates stored in cassettes containing the substrates stored in the core apparatus 10. The processing lines 20, ..., 90 serve as production lines for various kinds of processing for manufacturing color filters. The processing line 100 serves as a substrate inspection line for inspecting the glass substrates. The processing line 110 serves as a substrate recycling line for recycling the glass substrates on which various kinds of defects are detected. <P>COPYRIGHT: (C)2009,JPO&INPIT |
