发明名称 |
VERWENDUNG VON SCHUTZKAPPEN ALS MASKEN AUF WAFER- MASSSTAB |
摘要 |
A method of using protective caps (160) applied to a first side of a wafer (150) in the production of microfabricated devices (152), such as micro-electro-mechanical systems (MEMS) devices. One cap (160) covers each microfabricated device or group respectively, such that a gap remains between adjacent protective caps. One or more etches are applied to the gaps between the caps to remove material and separate the wafer into separate units. |
申请公布号 |
AT420462(T) |
申请公布日期 |
2009.01.15 |
申请号 |
AT20020729355T |
申请日期 |
2002.01.08 |
申请人 |
SILVERBROOK RESEARCH PTY. LIMITED |
发明人 |
SILVERBROOK, KIA |
分类号 |
H01L21/301;H01L21/822;B29C35/08;B29C43/36;B81B7/00;B81C1/00;H01L21/48;H01L23/02;H01L23/04 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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